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  Research and Innovation  
   

 

Sensors / MEMS

 

·         09A013 - Angularly Partitioned Evanescent Wave Absorption Sensor

·         08B070 – Thickness Shear Mode Resonators with Uniform Mass Sensitivity

·         08A019 - Integrated Thickness Shear Mode (TSM) Sensor and Surface Acoustic Wave (SAW) Device for Simultaneous Sensing and Removal of Analytes

·         06B126 – MEMS mirror arrays for use in Optical Spectrometric Detection

·         06A021 - Differential Capacitive Readout Configuration for an Infrared (IR) Imaging Array with Wafer Level Packaged Cavity and Micromachined On-Chip Microlenses

·         06A007 - MEMS High Speed Switching Converter

·         05A021 - Hydrogen sensor

·         05A017 - Salinity/conductivity sensor

·         04A065 – DNA biochip for detecting nucleic acid sequences

·         04A026 - Wireless MEMS sensor

·         03B108 - MEMS phase shifters using cascaded slow-wave structures

·         03B104 - A novel approach of integrating nanowires to transductors without surface contamination

·         03A054 - Electronic sensor regeneration systems for sandwich immunoassays

·         03A053 - Wet etching process

·         03A033 – Autonomous genosensor

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